MEMS
Micro Electro-Mechanical Systems (MEMS) is the technology of the very small, yet not within the realm of Molecular nanotechnology.
MEMS devices refer to mechanical components on the micrometre size and include 3D lithographic features of various geometries. They are typically manufactured using planar processing such as semiconductor photolithography. These devices generally range in size from a micrometre (a millionth of a metre) to a millimetre (thousandth of a metre. They are fabricated using modified silicon fabrication technology (used to make electronics), molding and plating, electro discharge machining (EDM), and other technologies capable of manufacturing very small devices.
Companies with strong MEMS programs include ones both large and small. The larger firms specialize in manufacturing high volume inexpensive components or packaged solutions for end markets such as automobiles, biomedical, and electronics. The successful small firms provide value in innovative solutions and absorb the expensive of custom fabrication with high sales margins.
Common applications include inkjet printers, which uses piezoelectrics or bubble ejection to deposit ink on paper, accelerometers in modern cars for airbag deployment in collisions, car tire pressure sensors, and disposable blood pressure sensors. The digital light projection DLP technology uses more than a million arrayed micromirrors to deflect and modulate light for video projection. MEMS sometimes go by the names micromechanics, micro machines, or micro system technology (MST). MEMS technology is used for optical switching technology for data communications.
Finite element analysis is an important part of MEMS design.