The Plasma processing reference article from the English Wikipedia on 24-Jul-2004 (provided by Fixed Reference: snapshots of Wikipedia from wikipedia.org)

Plasma processing

Plasma processing is a plasma-based material processing technology that aims at modifying the chemical and physical properties of a surface.

Plasma processing techniques include:

• Plasma activation
• Plasma modification
• Plasma functionalization
• Plasma polymerization

Related topics are plasma chemistry, chemical vapor deposition, and physical vapor deposition processes like sputtering, plasma ion doping, and reactive ion etching.

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